Various materials properties used in many industrial fields can be caused by fine fluctuations of structural arrangements, compositions, and chemical bonding states in atomic scale. It is important to measure such local fluctuations in materials accurately and precisely, which requires both atomic-level spatial resolution and single-atom sensitivity in characterization. In this research division, we conduct materials fine-structure characterization by transmission electron microscopy (TEM) and scanning electron microscopy (SEM) in combination with and chemical composition/sate analysis through X-ray energy dispersive spectrometry (XEDS) and electron energy-loss spectrometry (EELS). In addition, we also develop analytical techniques by laser induced breakdown spectroscopy for distribution measurement of light elements such as hydrogen, lithium, oxygen, and nitrogen, by cathodoluminescence spectroscopy for identification and distribution measurements of compounds, and by optical emission spectroscopy for in-situ determination of film compositions during sputtering.
Materials Processing and Characterization Division
Analytical Science Research Laboratory
Prof.Tetsu ICHITSUBO
- Prof. Masashi WATANABE
- Assoc. Prof. Susumu IMASHUKU
Development and Applications of Nano Fine-structure Characterization and Chemical Analysis for Understanding Various Materials Properties
electron microscopy, spectrometry, materials characterization